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Article · Superlattices and Microstructures · August 1, 2017

Structural properties and parameters of epitaxial silicon carbide films, grown by atomic substitution on the high-resistance (111) oriented silicon

Sergey A. Kukushkin, Kair Kh. Nussupov, Andrey V. Osipov, Н. Б. Бейсенханов, Dina I. Bakranova