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Talk · Journal of Physics Conference Series · November 1, 2017

On electron attachment effect on characteristics of the DBD in chlorine and its mixtures with xenon

Svetlana Avtaeva
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Abstract

The electron attachment effect on DBD characteristics in chlorine and its mixtures with xenon has been studied. Characteristics of the DBDs in pure chlorine and in xenon-chlorine mixtures with a chlorine fraction of 0.1-5% were modeled using the fluid model. It is shown that the electron attachment limits a magnitude of the DBD current, contributes to formation of multiple current spikes, appearance of a double layer near the dielectric surface and formation of XeCl* excimer molecules, and leads to a redistribution of the power deposited into the discharge: more power is deposited into ions and less power is deposited into electrons.

Atmospheric-Pressure Plasma ApplicationsLow-Pressure Plasma Processing and DiagnosticsVacuum and Plasma Arcsdielectric barrier dischargeelectron attachmentchlorine

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