Talk · International Thermal Plasma Processes Conference · January 1, 2023
MOLECULAR EMISSION SPECTROSCOPY FOR DIAGNOSTICS OF MAGNETICALLY ENHANCED RF DISCHARGE
Svetlana V. Avtaeva, É. B. Kulumbaev, M. Z. Mamytbekov, D.K. Otorbaev
Abstract
RF capacitive discharges enhanced by an external magnetic field were investigated in air, pure methane and methane/argon mixture. The discharge operating parameters were varied in the ranges: frequency 13.56 MHz, pressure 0.1 - 10 Pa, dissipated power 70 - 80 W, magnetic field induction 0 - 200 G. Nitrogen molecules in air plasma and CH radicals in methane and methane/argon plasma were studied by molecular emission spectroscopy methods. Rotational and vibrational temperatures of these molecules and radicals were estimated as a functions of the discharge parameters. In addition, the gas temperature were measured using a thermocouple.
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