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Talk · IEEE International Conference on Plasma Science · December 6, 2020

Modeling Properties of the DBD in Ar-S2 Mixtures Using a 1D Fluid Model

Svetlana Avtaeva
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Abstract

Discharges in noble gas mixtures with sulfur vapor allow obtaining the radiation spectrum, caused by radiation of S2 dimers, being like solar [1], [2]. Dielectric barrier discharges (DBD) are widely used for formation of excimer molecules radiation in excimer lamps [3]. For study efficiency of S2dimer radiation in DBDs a one-dimensional hydrodynamic model of a dielectric-barrier discharge (DBD) in Ar-S2 mixtures is developed, and the properties of the discharge are modeled. The discharge is excited in a 3-mm-long discharge gap between 2-mm-thick dielectric quartz layers covering metal electrodes. The DBD spatiotemporal characteristics at gas pressures of 300 Torr are modeled for the case in which a 20 kHz harmonic voltage with amplitude of 8 kV is applied to the electrodes. S2content in Ar-S2 mixtures was varied in the range 0.1-1%.

Atmospheric-Pressure Plasma ApplicationsVacuum and Plasma ArcsLow-Pressure Plasma Processing and Diagnosticsdielectric barrier dischargeone-dimensional hydrodynamic modeldischarge modeling

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