Skip to content
DSML.KZ
Publications

Article · Contributions to Plasma Physics · February 5, 2024

Impact of the electrode structure on post‐cathode plasma in the grid electrode DC glow discharge

Yiqun Ma, Xingbao Lyu, Chengxun Yuan, Svetlana V. Avtaeva, Anatoly A. Kudryavtsev, Zhongxiang Zhou

Svetlana Avtaeva
Open via DOI

Abstract

Abstract The discharge properties of post‐cathode plasma generated by grid electrode discharge were investigated. Post‐cathode plasma is the plasma, generated in an open discharge, at the other side of the cathode that is different from the electrode gap. Based on the unique electron transport, discharge chamber parameters were adjusted to compare their impact on the electron density of the post‐cathode plasma. The peak of the electron flow in the grid cathode hole and the peak of the post‐cathode plasma thickness appear in the same diameter of the grid electrode holes, which shows the crucial influence of the electron transport within the grid cathode on the post‐cathode plasma. The study also investigated the combined effects of cathode thickness and gas pressure on post‐cathode plasma thickness. The findings suggest that the primary factor influencing post‐cathode plasma thickness is the electron transport within the grid cathode.

Low-Pressure Plasma Processing and DiagnosticsAtmospheric-Pressure Plasma ApplicationsVacuum and Plasma Arcselectron transportelectron densityplasma thickness

More by Svetlana Avtaeva