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Article · High Temperature · June 1, 2010

Electron parameters in Xe-Ne mixtures

Abstract

The effect made by xenon concentration and by reduced electric field on the parameters of electrons in Xe-Ne mixtures is numerically studied. It is demonstrated that the increase in xenon concentration in mixture leads to a decrease in the average electron energy, to an increase in the frequency of collisions of electrons with gas atoms, and to variation of the transport coefficients of electrons. The increase in xenon concentration in mixture above ≈10% leads to an abrupt slowing down of the rates of excitation of xenon atoms. The efficiency of ionization increases with the xenon concentration increasing to ≈7%. The fraction of electron energy spent for excitation of xenon decreases with increasing electric field, and more energy is put into the ionization of xenon and into excitation and ionization of neon. The results of calculation of parameters of electrons make it possible to limit the search for xenon concentrations in Xe-Ne mixture, which are optimal for vacuum ultraviolet radiation, to the range of 1–10%.

Low-Pressure Plasma Processing and DiagnosticsAtomic and Molecular PhysicsVacuum and Plasma Arcsxenon concentrationreduced electric fieldelectron energy

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