Publications
Article · Plasma Chemistry and Plasma Processing · February 9, 2021
Characterization of Reversed Arc Hydrocarbon Plasma in Material Processing
Svetlana V. Avtaeva, Vladimir I. Gorokhovsky
Vacuum and Plasma ArcsLow-Pressure Plasma Processing and DiagnosticsAtmospheric-Pressure Plasma Applicationsplasma-enhanced chemical vapor depositionhydrogen dissociationreaction-diffusion-advection model
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